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FOUP Exchanger XT (FEXT)
FOUP Exchanger XT (FEXT)
Introducing our advanced semiconductor tool, designed to streamline wafer transfer with unparalleled ease. Featuring an intuitive user interface and automated processes, it ensures effortless operation for all skill levels. Safety is paramount, with built-in sensors and fail-safes protecting both operators and wafers. The tool’s precision robotics prevent wafer handling errors, while its advanced filtration system guarantees a clean environment free of debris. Experience seamless integration and elevated performance with our cutting-edge solution, guaranteed to increase wafer yield.
Product Profile
Product Profile
Product Model: FEXT, FOUP Wafer Handling System
Usage: Wafer Facilities
Wafer Sizes: 300mm, 200mm, 150mm, 100mm
Throughput: 7 WPM (Wafers Per Minute)
Standard Features
Standard Features
FOUP Size: 300mm FOUP
Loadport Number: 2-4
Throughput: 7 Wafers Per Minute
Dimensions: 1.8M (L) x 1.2M (W)
Weight: ~500kg
Utilities: 120V Single Phase
EMO: x4 EMO Units
Compliance: SEMI-standard (please reach out for more details)
Functionality
Functionality
Wafer Exchange: Exchange wafers from up to 4 loadports. Eliminate the need for manual opening of FOUPs, or hand-held wafer exchanges.
Wafer Realignment: Notch orientation alignment of any 90 degree interval.
Wafer Reading: Bar code and OCR reading available as a non-standard option.
Host: SECS/GEM available as a non-standard option.
Please reach out with any questions, or for more information on WGM products:
Phone: 480-390-6169
Email: service@wgmsolutions.com
WGM does not claim ownership of any third party materials and products
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